Non-contact Three-dimensional Surface Roughness / Shape Measuring Machine Opt-scope (White Interference Microscope)

Three-dimensional roughness of sliding surface (high polished surface) of bearings. It supports various applications such as analysis of scratches and wear, shape evaluation of cutting edges of abrasive wheels and carbide chips, and surface defect detection of semiconductor wafers. Measurement of high polished surface, MEMS fine shape measurement, measurement of machined parts such as automotive parts, etc. are widely available.

【Features of Opt-scope (Optoscope)】
■ Non-contact, wide range, high resolution
It has high resolution of 0.1 nm, and it can be applied in a wide range from analysis of narrow range fine roughness to analysis of wide range of undulation shape.

■ 3D measurement and evaluation (conforming to ISO 25178-2) on the surface properties of machined surfaces in a non-contact manner
By our proprietary method, it is possible to acquire more clearly the shape data of the machined surface which the existing white interference microscope is not good at. The width of the object to be measured expanded widely.