Flatness Measuring Instrument

Air slide made by ultra-precision machining technology of KURODA, with liner servo motor enabled high precision flatness measurement. Capability to measure various workpiece. Various sensor heads are available in accordance with evaluation items, accuracy, and objects. Proprietary software supports versatile analysis and visualization, while a design that balances safety and operability ensures a stable measuring environment.

【Main product lineup and features】
Precision flatness measuring instrument 「SF-640M」

・Using Kuroda air sliders on the XY axes with linear-servo drive, the system enables high-precision, high-speed measurement over a wide area.
・Various sensor heads are available according to work piece a evaluation items.
・Measurement parameters such as pitch and speed can be freely configured, enabling results display and analysis tailored to specific requirements. ・Because both hardware and software are developed in-house, specifications and functions can be flexibly customized.