Flatness Measuring Instrument ︱By combining precision-machining technology with linear drive, the system achieves stable flatness measurement over a wide area.

Air slide made by ultra-precision machining technology of KURODA, with liner servo motor enabled high precision flatness measurement. Capability to measure various workpiece. Various sensor heads are available in accordance with evaluation items, accuracy, and objects. Proprietary software supports versatile analysis and visualization, while a design that balances safety and operability ensures a stable measuring environment.

【Main product lineup and features】
Precision flatness measuring instrument 「SF-640M」

・Using Kuroda air sliders on the XY axes with linear-servo drive, the system enables high-precision, high-speed measurement over a wide area.
・Various sensor heads are available according to work piece a evaluation items.
・Measurement parameters such as pitch and speed can be freely configured, enabling results display and analysis tailored to specific requirements.
・Because both hardware and software are developed in-house, specifications and functions can be flexibly customized.

Surface and Flatness Measuring systems for Large Discs “Nanometro® FR Series”

・This series incorporates a rotary air table. The air slide made by KURODA high precision technology ,with liner servo motor for X axis enabled high speed and high precision measurement for discs of up to φ1000mm.
・Supports concentric circle measurements and radial measurement.
・Kuroda’s proprietary software allows arbitrary measurement-pitch settings, enabling highly flexible measurements tailored to the size of the target workpiece.

【Main specifications】

	SF-640M	Nanometro 700FR	Nanometro 1000FR
Measurement area (X × Y)	650mm × 450mm	φ700mm(max.)	φ1000mm(max.)
Overall measurement accuracy	0.6μm (※1)	0.4μm	0.6μm
Repeatability (accuracy)	0.1μm (※2)	0.05μm(σ)
Display resolution	0.01μm	0.01μm
Measuring head	Non-contact laser displacement sensor, electric micrometer	Electric micrometer
Minimum data interval	1μm	―
Measurement speed	0.5 ～ 50mm/sec	35mm/s　※Maximum measurement speed (X-axis)
Axis / guide way	Ceramics air slider	X-axis: ceramics air slider θ-axis: air bearing
Drive system	X-axis: linear motor Y-axis: servo motor	X-axis: linear motor θ-axis: servo motor
Maximum workpiece mass	40kg	60kg	80kg
Overall dimensions	W1820mm × D1200mm × H1550mm	―
Main unit mass	1000kg	―
Required electric power supply	AC200V (50/60Hz)　15A	―
Required compressed air	Clean dry air (CDA) 　0.5MPa	―
Air flow rate	100L/min (ANR)	―
Maximum workpiece height	50mm	―
Installation environment	Room temperature：20℃ ～ 25℃ (Temperature variation must be within 1 °C). Floor strength: minimum load capacity of 9,800 N/m²	―

※1 Result of Optical flat measuring for overall surface PV (Peak-to-Valley) value
※2 The standard deviation of the optical flat 10times repeated measurements.

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Flatness Measuring Instrument