Flatness Measuring Instrument

Air slide made by ultra-precision machining technology of KURODA, with liner servo motor enabled high precision flatness measurement. Capability to measure various workpiece. Various sensor heads are available in accordance with evaluation items, accuracy, and objects. Proprietary software supports versatile analysis and visualization, while a design that balances safety and operability ensures a stable measuring environment.

【Main product lineup and features】
Precision flatness measuring instrument 「SF-640M」

・Using Kuroda air sliders on the XY axes with linear-servo drive, the system enables high-precision, high-speed measurement over a wide area.
・Various sensor heads are available according to work piece a evaluation items.
・Measurement parameters such as pitch and speed can be freely configured, enabling results display and analysis tailored to specific requirements.
・Because both hardware and software are developed in-house, specifications and functions can be flexibly customized.

Surface and Flatness Measuring systems for Large Discs “Nanometro® FR Series”

・This series incorporates a rotary air table. The air slide made by KURODA high precision technology ,with liner servo motor for X axis enabled high speed and high precision measurement for discs of up to φ1000mm.
・Supports concentric circle measurements and radial measurement.
・Kuroda’s proprietary software allows arbitrary measurement-pitch settings, enabling highly flexible measurements tailored to the size of the target workpiece.

【Main specifications】

※1 Result of Optical flat measuring for overall surface PV (Peak-to-Valley) value
※2 The standard deviation of the optical flat 10times repeated measurements.