Non-contact 3D Shape Measuring Device Mitaka Kohki

possible to measure the surface shape without having to replace the workpiece from a small area to a large area.Measure workpieces with steep angles and reflectivity independent with a high resolution of 1nm.

this device is based on an optical microscope and uses a tracking type autofocus with its own AF sensor.High precision measurement from a small area corresponding to stage movement.Completely non-contact type,ideal for non-contact roughness measurement （line roughness、surface roughness）and step measurement.

■model number lineup
NH series
NH-3SPs／PF-60

■main features
・capable of measuring steep angles
・AF optics and Hybrid AF technology for High autofocus repeatability
・wide measuring range with high resolution

■measuring examples
・Fingerprint
・Diamond abrasive grain
・warpage and waviness of wafer
・oblique incidence X-ray mirror
・grinding work surface
・wear volume of brake pad
・nozzle, etc.

・Z resolution：PF-60(10nm),NH-3SPs(1nm) ・range of measurement：PF-60(60×60mm),NH-3SPs(150×150mm) ・specially priced evaluation software for lenses(optional) ・elevation stage(optional) ・high-precision measurement of deformation due to temperature change in a high-precision temperature controlled constant temperature bath(optional)

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