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Nanoindentation Tester ELIONIX

achieves high data reproducibility by suppressing disturbances in the measurement environment.

1. The only nanoindentation tester with a temperature control mechanism
※It reduces sample and tester thermal expansion to improve data reproducibility.

2. equipped with a high-precision positioning stage that adopts the high-precision stage technology for electron-beam lithography equipment developed in-house
※Positioning hardness tests with 0.1µm steps are possible.

3. anti-vibration mechanism
※equipped with a wedge-shaped stage and an active anti-vibration table、resistant to vibration and enhances data reproducibility.


■main features
・load system
【heavy duty unit】
load range :0.005mN(5μN)~2,000mN(2N)
resolution:5nN
【low load unit】
load range :0.005mN(0.5μN) ~10mN
load range:0.03nN

・indenter displacement measurement system
measuring range :±50μm
resolution:0.3pm
measurement method :optical displacement meter

・indenter berkovich indenter :α=65.03°(diagonal angle 115°)

・external dimensions/installation conditions
tester body:650㎜(W)×650㎜(D)×1200㎜(H)
power supply:single phase 100V/10A
floor vibration:0.5gal p-p or less (less low frequency vibration)

・option (holder)
heating holder:high load unit(maximum heating temperature 250℃)
low load unit(maximum heating temperature180℃)
cooling holder:temperature control range(-30℃~100℃)
resin embedding holder:holder for resin-embedded samples for cross-sectional observation
custom holder:we will design and manufacture according to the sample

・option(measurement)
surface profile test:a function that can acquire the shape of the sample with the indenter and shoot it.useful for samples with a lot of unevenness.

viscoelasticity test: possible to measure the storage modulus(E),loss modulus(E'') and loss factor(tanσ) by applying a load at an arbitrary frequency while the indenter is pressed into the sample with a constant load.also, by using a heating stage together, possible to evaluate the glass transition point(Tg).

softening temperature measurement:possible to measure the softening temperature by increasing the temperature with a heating holder while keeping the indenter in contact with the sample under a constant load.

underwater test: possible to test the hardness of samples immersed in water.

particle strength test:This method involves compressing or crushing microparticles and measuring their strength with a flat indenter.

resistance test:Another advantage of particle strength testing is the ability to measure a conductive particles electrical resistance while compressing it.

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