Nanoindentation Tester ELIONIX
achieves high data reproducibility by suppressing disturbances in the measurement environment.

1. The only nanoindentation tester with a temperature control mechanism
※It reduces sample and tester thermal expansion to improve data reproducibility.
2. equipped with a high-precision positioning stage that adopts the high-precision stage technology for electron-beam lithography equipment developed in-house
※Positioning hardness tests with 0.1µm steps are possible.
3. anti-vibration mechanism
※equipped with a wedge-shaped stage and an active anti-vibration table、resistant to vibration and enhances data reproducibility.
■main features
・load system
【heavy duty unit】
load range :0.005mN(5μN)~2,000mN(2N)
resolution:5nN
【low load unit】
load range :0.005mN(0.5μN) ~10mN
load range:0.03nN
・indenter displacement measurement system
measuring range :±50μm
resolution:0.3pm
measurement method :optical displacement meter ・indenter berkovich indenter :α=65.03°(diagonal angle 115°) ・external dimensions/installation conditions tester body:650㎜(W)×650㎜(D)×1200㎜(H) power supply:single phase 100V/10A floor vibration:0.5gal p-p or less (less low frequency vibration) ・option (holder) heating holder:high load unit(maximum heating temperature 250℃) low load unit(maximum heating temperature180℃) cooling holder:temperature control range(-30℃~100℃) resin embedding holder:holder for resin-embedded samples for cross-sectional observation custom holder:we will design and manufacture according to the sample ・option(measurement) surface profile test:a function that can acquire the shape of the sample with the indenter and shoot it.useful for samples with a lot of unevenness. viscoelasticity test: possible to measure the storage modulus(E),loss modulus(E'') and loss factor(tanσ) by applying a load at an arbitrary frequency while the indenter is pressed into the sample with a constant load.also, by using a heating stage together, possible to evaluate the glass transition point(Tg). softening temperature measurement:possible to measure the softening temperature by increasing the temperature with a heating holder while keeping the indenter in contact with the sample under a constant load. underwater test: possible to test the hardness of samples immersed in water. particle strength test:This method involves compressing or crushing microparticles and measuring their strength with a flat indenter. resistance test:Another advantage of particle strength testing is the ability to measure a conductive particles electrical resistance while compressing it.
・load system
【heavy duty unit】
load range :0.005mN(5μN)~2,000mN(2N)
resolution:5nN
【low load unit】
load range :0.005mN(0.5μN) ~10mN
load range:0.03nN
・indenter displacement measurement system
measuring range :±50μm
resolution:0.3pm
measurement method :optical displacement meter ・indenter berkovich indenter :α=65.03°(diagonal angle 115°) ・external dimensions/installation conditions tester body:650㎜(W)×650㎜(D)×1200㎜(H) power supply:single phase 100V/10A floor vibration:0.5gal p-p or less (less low frequency vibration) ・option (holder) heating holder:high load unit(maximum heating temperature 250℃) low load unit(maximum heating temperature180℃) cooling holder:temperature control range(-30℃~100℃) resin embedding holder:holder for resin-embedded samples for cross-sectional observation custom holder:we will design and manufacture according to the sample ・option(measurement) surface profile test:a function that can acquire the shape of the sample with the indenter and shoot it.useful for samples with a lot of unevenness. viscoelasticity test: possible to measure the storage modulus(E),loss modulus(E'') and loss factor(tanσ) by applying a load at an arbitrary frequency while the indenter is pressed into the sample with a constant load.also, by using a heating stage together, possible to evaluate the glass transition point(Tg). softening temperature measurement:possible to measure the softening temperature by increasing the temperature with a heating holder while keeping the indenter in contact with the sample under a constant load. underwater test: possible to test the hardness of samples immersed in water. particle strength test:This method involves compressing or crushing microparticles and measuring their strength with a flat indenter. resistance test:Another advantage of particle strength testing is the ability to measure a conductive particles electrical resistance while compressing it.
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