Transfer robot / TAZMO｜Tazmo's atmospheric transfer robot for semiconductors (wafers) that realizes high-speed transfer and high cleanliness

Tazmo's clean transfer robots are highly regarded in Japan and abroad for their unique technology. Highly trusted for its high speed and cleanliness. We can make proposals compatible for package batch manufacturing PLP, free-access, etc., including reasonable prices according to the application.

【Product features】
・PLP compatible: Servo motor specification - Clean robot for atmospheric use
Single arm robot/double arm robot specialized in PLP
Maximum work size: 650 mm square substrate, maximum reachable distance: 1500 mm

・TT301A series: Servo motor specification - Clean robot for atmospheric use
High performance and low-cost transfer robot developed for EFEM, SEMI F47 compatible
Tazmo's flagship model that achieves high-speed recoil and high cleanliness.
(TT301A-RA, TT301A-WA, TT301A-WB, TT301A-SA)

・MTE series: Servo motor specification - Free access robot
Compatible with 300mm wafers (MTE-G is compatible with 450mm)
Tazmo's flagship model that achieves high-speed conveyance and high cleanliness
(MTE-E, MTE-C, MTE-D, MTE-G)

・MTSR series: Stepping motor specification - Free access robot
Compatible with 300mm wafers
(MTSR-3, MTSR-4)

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Transfer robot / TAZMO